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单词 nanolithography
释义

> as lemmas

nanolithography
nanolithography n.
Brit. /ˌnanə(ʊ)lᵻˈθɒɡrəfi/
,
U.S. /ˌnænoʊləˈθɑɡrəfi/
ΚΠ
1981 Jrnl. Vacuum Sci. & Technol. 19 946/1 An electron beam system specifically designed and developed for nanolithography has been described by Lee and Ahmed.
1993 Nature 30 Sept. 391/1 Recent developments in nanolithography have enabled metal dots to be patterned that are small enough for single electrons to be counted entering or leaving.
extracted from nano-comb. form
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