单词 | nanolithography |
释义 | > as lemmasnanolithography nanolithography n. Brit. /ˌnanə(ʊ)lᵻˈθɒɡrəfi/ , U.S. /ˌnænoʊləˈθɑɡrəfi/ ΚΠ 1981 Jrnl. Vacuum Sci. & Technol. 19 946/1 An electron beam system specifically designed and developed for nanolithography has been described by Lee and Ahmed. 1993 Nature 30 Sept. 391/1 Recent developments in nanolithography have enabled metal dots to be patterned that are small enough for single electrons to be counted entering or leaving. < as lemmas |
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