单词 | microlithography |
释义 | > as lemmasmicrolithography microlithography n. Brit. /ˌmʌɪkrə(ʊ)lᵻˈθɒɡrəfi/ , U.S. /ˌmaɪkroʊləˈθɑɡrəfi/ ΚΠ 1974 G. Pircher in Le Vide 29 385 The main properties of a microlithography process are the quality of drawing and the time required for mask-making. 1997 Electronics Times 30 June 157/1 (advt.) Cymer..started building the first safe, reliable excimer laser for microlithography over ten years ago. < as lemmas |
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