electron microprobe


electron microprobe

[i′lek‚trän ′mī·krō‚prōb] (physics) An x-ray machine in which electrons emitted from a hot-filament source are accelerated electrostatically, then focused to an extremely small point on the surface of a specimen by an electromagnetic lens; nondestructive analysis of the specimen can then be made by measuring the backscattered electrons, the specimen current, the resulting x-radiation, or any other resulting phenomenon. Also known as electron probe.