释义 |
compliant substrate compliant substrate[kəm¦plī·ənt ′səb‚strāt] (electronics) A semiconductor substrate into which an artificially formed interface is introduced near the surface which makes the substrate more readily deformable and allows it to support a defect-free semiconductor film of essentially any lattice constant, with dislocations forming in the substrate instead of in the film. Also known as sacrificial compliant substrate. |