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x-ray lithography
释义
x-ray lithography
x-ray lithography
[
′eks ‚rā li′thäg·rə·fē
]
(electronics)
Lithography in which the resist is exposed to a well-collimated, high-intensity x-ray beam projected through a special mask in close proximity to the silicon slice.
See
XRL
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XRL
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更新时间:2025/10/15 11:30:39