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recoil implantation
释义
recoil implantation
recoil implantation
[
¦rē‚kȯil ‚im·plan′tā·shən
]
(electronics)
A mechanism for ion-beam mixing of a film and a substrate in which atoms are driven from the film into the substrate as a result of direct collisions with incident ions.
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更新时间:2026/7/5 1:25:25