单词 | secs/gem |
释义 | SECS/GEMSECS/GEM(SEMI Equipment Communications Standard/Generic Equipment Model) Communications protocols between a host computer and semiconductor manufacturing equipment. SECS is a layer 6 protocol that describes the content of the messages while GEM is a higher layer application protocol that defines the messages themselves. SECS/GEM is used to control wafer steppers, lithographic equipment, etchers, ion implanters and other machines. |
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