secondary ion mass spectrometry


secondary ion mass spectrometry

A technique of mass spectrometry in which a beam of energised ions (appoximately 5 keV in energy) is used to sputter sample atoms and molecules from a thin solid film or surface (classic SIMS), or organic molecules that may be present as a thin film or dissolved in a liquid or solid solution (molecular SIMS or liquid SIMS) held on the surface of a beam-intersecting sample probe.