释义 |
secondary ion mass spectrometer secondary ion mass spectrometer[′sek·ən‚der·ē ′ī‚än ′mas spek′tram·əd·ər] (engineering) An instrument for microscopic chemical analysis, in which a beam of primary ions with an energy in the range 5-20 kiloelectronvolts bombards a small spot on the surface of a sample, and positive and negative secondary ions sputtered from the surface are analyzed in a mass spectrometer. Abbreviated SIMS. Also known as ion microprobe; ion probe. |