释义 |
micro-electro-mechanical system micro-electro-mechanical system[¦mī·krōi‚lek·trə·mə′kan·ə·kəl ‚sis·təm] (engineering) A system in which micromechanisms are coupled with microelectronics, most commonly fabricated as microsensors or microactuators. Abbreviated MEMS. Also known as microsystem. |