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micro-electro-mechanical system
释义
micro-electro-mechanical system
micro-electro-mechanical system
[
¦mī·krōi‚lek·trə·mə′kan·ə·kəl ‚sis·təm
]
(engineering)
A system in which micromechanisms are coupled with microelectronics, most commonly fabricated as microsensors or microactuators. Abbreviated MEMS. Also known as microsystem.
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更新时间:2026/6/3 12:40:36