MEMS

[memz or ¦em¦ē¦em′es] (engineering) micro-electro-mechanical system

MEMS

microelectromechanical system

MEMS

(MicroElectroMechanical Systems) Tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. In the research labs since the 1980s, MEMS devices began to materialize as commercial products in the mid-1990s. They are used to make pressure, temperature, chemical and vibration sensors, light reflectors and switches, as well as accelerometers for vehicle airbags, smartphones, tablets and games (see accelerometer).

MEMS technology is also used to make inkjet print heads, microactuators for read/write heads and all-optical switches that reflect light beams to the appropriate output port.

MEMS and MOEMS
When optical components are included in a MEMS device, it is called a micro-opto-electromechanical system (MOEMS). For example, adding a photonic sensor to a silicon chip constitutes a MOEMS device. See micromachine, MEMS mirror, DLP and optical switch.

MEMS vs. Nanotechnology
Sometimes MEMS and nanotechnology are terms that are used interchangeably, because they both deal with microminiaturized objects. However, they are vastly different. MEMS deals with creating devices that are measured in micrometers, whereas nantotechnology deals with manipulating atoms at the nanometer level.

MEMS-based Optical Switch

In an all-optical switch, MEMS mirrors reflect the input signal to an output port without regard to line speed or protocol. This technology is expected to be the dominant method for building photonic switches.

Sample Micromachines

Microfabrica's EFAB system was the first MEMS foundry process to accept CAD files as input, turning customer designs into micromachines much faster than traditional methods. EFAB builds the devices one metal layer at a time. In this image, the square at the top is a microfluidics device with internal passageways used for a "lab on a chip." The multi-arm device (center) is a fuel injection nozzle. Bottom left is an accelerometer, and bottom right is an inductor used in RF circuits. (Image courtesy of Microfabrica Inc., www.microfabrica.com)

MEMS-Based Accelerometer

MEMSIC's dual-axis thermal accelerator is a MEMS-based semiconductor device that works conceptually like the air bubble in a construction level. The square in the middle of the chip is a resistor that heats up a gas bubble. The next larger squares contain thermal couples that sense the location of the heated bubble as the device is tilted or accelerated. (Image courtesy of MEMSIC, Inc.)

MEMS

Acronym	Definition
MEMS➣Micro Electro-Mechanical Systems
MEMS➣Medieval and Early Modern Studies (various schools)
MEMS➣Micro Electronic Mechanical Systems
MEMS➣Metallurgical Engineering & Materials Science (various locations)
MEMS➣Manalapan-Englishtown Middle School (Manalapan, NJ)
MEMS➣Medication Event Monitoring System
MEMS➣Microsystems and Microelectromechanical Systems
MEMS➣Mobile Emergency Medical System
MEMS➣Microelectromecaniques
MEMS➣Micro Electro Mechanical Sensor
MEMS➣Modular Emergency Medical System
MEMS➣Military Emergency Management Specialist (State Guard Association of the US)
MEMS➣Maine Emergency Medical Services (Maine Department of Public Safety)
MEMS➣Micro Electrical Machine System
MEMS➣Soprano Mobile Enterprise Messaging Suite
MEMS➣Medical Equipment Management System
MEMS➣Maryland Emergency Medical Services
MEMS➣Malaysian Endocrine & Metabolic Society (Malaysia)
MEMS➣Member Enrollment Management System
MEMS➣Master Events Management System (tool assisting in the planning, execution and analysis of MOOTW exercises)
MEMS➣Modular Emergency Management Systems