1988 E. S. Raymond 2 Good Reasons for doing Self-timed Logic in comp.arch (Usenet newsgroup) 26 Feb. 3D VLSI assembled by nanorobots provides another way out.
1990 Jan. 10/3 Yet life in the nanofuture will not be all roses, Drexler fears: ‘gray goo’ weapons might be developed—soups of omnivorous nanorobots that could reduce the biosphere to dust.
1993 A. Toffler & H. Toffler xiv. 120 Nano-robots would be small enough to operate like submarines in the bloodstream of humans.